APPLICATION OF DIGITAL IMAGE MANAGE IN MICRO-TOPOGRAPHY MEASURE
表面微观形貌测量中数字图象处理的应用

When applying phase stepping interferometry to measure testing surface,distortion will be caused as a result of various error factor.Digital signal filter and smoothness technique was applied in this paper,and flexuosity and system noise caused by system error in measure process were eliminated.The high frequency noise and artificial profile caused by image digital and transmite process were eliminated too.All of this made the measure results more approach actual numerical value.