%0 Journal Article
%T APPLICATION OF DIGITAL IMAGE MANAGE IN MICRO-TOPOGRAPHY MEASURE<br>表面微观形貌测量中数字图象处理的应用
%A Hui Mei
%A Niu Hanbeng
%A Xu Yi
%A Xu Yuxian
%A Li Qingxiang
%A <br>惠梅
%A 牛憨笨
%A 许谊
%A 徐毓娴
%A 李庆祥
%J 光子学报
%D 2001
%I 
%X When applying phase stepping interferometry to measure testing surface,distortion will be caused as a result of various error factor.Digital signal filter and smoothness technique was applied in this paper,and flexuosity and system noise caused by system error in measure process were eliminated.The high frequency noise and artificial profile caused by image digital and transmite process were eliminated too.All of this made the measure results more approach actual numerical value.
%K Micro
%K topography
%K Phase
%K stepping interferometry
%K Digital image manage<br>表面微观形貌
%K 相移干涉术
%K 数字图象处理
%K 测量
%K 数字信号滤波
%K 平滑技术
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=361E5C9CC91484CE&yid=14E7EF987E4155E6&vid=340AC2BF8E7AB4FD&iid=708DD6B15D2464E8&sid=40295B54D40AE4B3&eid=A9251EF312FA9D67&journal_id=1004-4213&journal_name=光子学报&referenced_num=3&reference_num=7