THE STUDY OF GaAs EXPITAXIAL PLATE THERMOCOMPORESSION BONDED TO GLASS TECHNOLOGY
玻璃与GaAs外延片热压粘结工艺研究

In this paper we reported the process and principle of large-area GaAs epitaxial plate thermocompression bonded to K4 window-glass technology,and emphatically discussed the effects of the deposition of SiN film,the controlling of bonding temperature and the choice of pressure on bonding quality.