A STUDY OF DIAMOND THIN FILMS GROWTH BY HFCVD
热丝CVD生长金刚石薄膜研究

We have studied that,in this paper,the effects of the handpolished surface of the substrateson structure of deposition films,in diamond thin films growth by HFCVD,and effects of non-intrinsicabsorption by impurities of deposition films on infrared optics transmittance of deposition films.