%0 Journal Article
%T A STUDY OF DIAMOND THIN FILMS GROWTH BY HFCVD<br>热丝CVD生长金刚石薄膜研究
%A Yang Guowei
%A <br>杨国伟
%A 毛友德
%J 光子学报
%D 1995
%I 
%X We have studied that,in this paper,the effects of the handpolished surface of the substrateson structure of deposition films,in diamond thin films growth by HFCVD,and effects of non-intrinsicabsorption by impurities of deposition films on infrared optics transmittance of deposition films.
%K HECVD
%K Diamond thin film<br>热丝CVD
%K 金刚石薄膜
%K 生长
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=04865B32C9FAE11E6871DCBD3FAF76C4&yid=BBCD5003575B2B5F&vid=B91E8C6D6FE990DB&iid=0B39A22176CE99FB&sid=A58CF3BAE79427D0&eid=4609832E4B5C797B&journal_id=1004-4213&journal_name=光子学报&referenced_num=0&reference_num=6