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中国物理 B 2005
Formation of arrayed holes on metal foil and metal film by multibeam interfering femtosecond laser beams
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Abstract:
We report on an optical interference method to fabricate arrayed holes on metal nickel foil and aluminum film deposited on glass substrate by means of five-beam interference of femtosecond laser pulses. Optical microscope and scanning electron microscope observations revealed that arrayed holes of micrometer-order are fabricated on both metal foil and metal film. The present technique allows one-step, large-area, micrometer processing of metal materials for potential industrial applications.