%0 Journal Article
%T Formation of arrayed holes on metal foil and metal film by multibeam interfering femtosecond laser beams<br>利用多束飞秒激光干涉在金属箔和金属薄膜上形成阵列孔
%A Zhao Quan-Zhong
%A Qiu Jian-Rong
%A Zhao Chong-Jun
%A Jiang Xiong-Wei
%A Zhu Cong-Shan
%A <br>赵全忠
%A 邱建荣
%A 赵崇军
%A 姜雄伟
%A 朱从善
%J 中国物理 B
%D 2005
%I 
%X We report on an optical interference method to fabricate arrayed holes on metal nickel foil and aluminum film deposited on glass substrate by means of five-beam interference of femtosecond laser pulses. Optical microscope and scanning electron microscope observations revealed that arrayed holes of micrometer-order are fabricated on both metal foil and metal film. The present technique allows one-step, large-area, micrometer processing of metal materials for potential industrial applications.
%K array microstructure
%K interference
%K femtosecond laser
%K diffractive beam splitter<br>排列微结构
%K 飞秒激光
%K 衍射束分裂
%K 光学干涉
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=CD8D6A6897B9334F09D8D1648C376FB4&aid=F6A9F5D9B04E48BC877C7730014E88A0&yid=2DD7160C83D0ACED&vid=F3583C8E78166B9E&iid=B31275AF3241DB2D&sid=7B747CE18E2C7596&eid=01A9864A3FFB986F&journal_id=1009-1963&journal_name=中国物理&referenced_num=0&reference_num=39