CAM TECHNIQUE FOR WRITING OF TINY FIGURE WITH DIFFRACTION-FREE PHOTON BEAM
用无衍射光子束写入细微图形的CAM技术

A new method is proposed for writing of tiny figure with diffraction free photon beam.Production principle of diffraction free photon beam is proved on theory. Device of diffraction freebeam is shown. CAM lithography machining is finished and its principle is introduced.