%0 Journal Article
%T CAM TECHNIQUE FOR WRITING OF TINY FIGURE WITH DIFFRACTION-FREE PHOTON BEAM<br>用无衍射光子束写入细微图形的CAM技术
%A Yu Jianguo
%A Yu Chongxiu
%A Pei Wen
%A Xu Daxiong
%A <br>余建国
%A 余重秀
%J 光子学报
%D 1997
%I 
%X A new method is proposed for writing of tiny figure with diffraction free photon beam.Production principle of diffraction free photon beam is proved on theory. Device of diffraction freebeam is shown. CAM lithography machining is finished and its principle is introduced.
%K Diffraction free photon beam
%K Tiny figure
%K CAM lithography machine<br>无衍射光子束
%K 细微图形
%K CAM
%K 光刻机
%K 集成电路
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=B901B9CF067B227F4B6F4D197DE9979E&yid=5370399DC954B911&vid=96C778EE049EE47D&iid=B31275AF3241DB2D&sid=F9A6B6F259CE5121&eid=F204392B3B11C3BD&journal_id=1004-4213&journal_name=光子学报&referenced_num=1&reference_num=2