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AFM Studies of Platinum Silicide Thin Films on Silicon Grown by Pulsed Laser Deposition

Keywords: PtSi,Thin films,PLD,AFM
硅化铂薄膜
,肖特基晶体管,PLD,AFM,结构,栅栏,,薄膜生长,原子力显微镜

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Abstract:

PtSi ultra-thin films were grown on Si-wafer using pulsed laser deposition (PLD). The surface structure of these films was studied by atomic force microscopy (AFM). In addition, the compositional structure of the PtSi as determined from X-ray photoelectron spectroscopy (XPS) is discussed. First report of a possible growth mechanism is presented, on studying the variation of morphological features (i.e., roughness and size of crystallites) with annealing temperatures and the film thicknesses.

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