%0 Journal Article
%T AFM Studies of Platinum Silicide Thin Films on Silicon Grown by Pulsed Laser Deposition
%A Meicheng LI
%A Liancheng ZHAO
%A Wei CAI
%A Dage LIU
%A <br>MeichengLI
%A DageLIU
%J 材料科学技术学报
%D 2002
%I 
%X PtSi ultra-thin films were grown on Si-wafer using pulsed laser deposition (PLD). The surface structure of these films was studied by atomic force microscopy (AFM). In addition, the compositional structure of the PtSi as determined from X-ray photoelectron spectroscopy (XPS) is discussed. First report of a possible growth mechanism is presented, on studying the variation of morphological features (i.e., roughness and size of crystallites) with annealing temperatures and the film thicknesses.
%K PtSi
%K Thin films
%K PLD
%K AFM<br>硅化铂薄膜
%K 肖特基晶体管
%K PLD
%K AFM
%K 结构
%K 栅栏
%K 硅
%K 薄膜生长
%K 原子力显微镜
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=324DC3CAB22330DB19158AE0A9B7BFA5&aid=34FEF98F5BF1CAB748D588B7703FC6B5&yid=C3ACC247184A22C1&vid=13553B2D12F347E8&iid=CA4FD0336C81A37A&sid=B91E8C6D6FE990DB&eid=96C778EE049EE47D&journal_id=1005-0302&journal_name=材料科学技术学报&referenced_num=1&reference_num=0