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OALib Journal期刊
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ELECTRONIC PROPERTIS OF Y-DOPED AMORPHOUS SILICON
掺钇非晶硅的电特性

Keywords: sputtering Y-doped amorphoussilicon eletronic properties
溅射
,掺Y,非晶硅,电特性,

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Abstract:

A new n-type amorphous silicon material, which is prepared by doping with Yttrium by r.f.sputtering, has been obtained. Temperature dependence of conductivity for several samlpes containing different concentration of Y shows that, as the concentration of

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