Properties of diamond-like carbon films deposited by unbalanced magnetron sputtering
非平衡磁控溅射类金刚石碳膜的性能

Smooth,dense and uniform diamond-like carbon(DLC)films for industrial applica- tion were successfully prepared by unbalanced magnetron sputtering.The morphology,structure and tribological properties were studied by AFM,Raman spectra and tribological tester.Results show that working current of target plays an important role in DLC film deposition.Deposition rate,sp~3 bonds content and friction coefficient oncrease with increasing the working current of target.In the beginning of the wear experiment,the friction coefficient is high.but then decreases gradually with the increase of sliding cycles,reaching a constant value ranging between 0.1 and 0.15.