%0 Journal Article
%T Properties of diamond-like carbon films deposited by unbalanced magnetron sputtering<br>非平衡磁控溅射类金刚石碳膜的性能
%A LIU Cui
%A LI Guoqing
%A ZHANG Chengwu
%A LI Xin State Key Lab for Materials Modification by Lasen Ion
%A Electron Beams
%A Dalian University of Technology
%A Dalian
%A <br>柳翠
%A 李国卿
%A 张成武
%A 李新
%J 材料研究学报
%D 2004
%I 
%X Smooth,dense and uniform diamond-like carbon(DLC)films for industrial applica- tion were successfully prepared by unbalanced magnetron sputtering.The morphology,structure and tribological properties were studied by AFM,Raman spectra and tribological tester.Results show that working current of target plays an important role in DLC film deposition.Deposition rate,sp~3 bonds content and friction coefficient oncrease with increasing the working current of target.In the beginning of the wear experiment,the friction coefficient is high.but then decreases gradually with the increase of sliding cycles,reaching a constant value ranging between 0.1 and 0.15.
%K inorganic non-metallic materials
%K diamond-like carbon films
%K unbalanced magnetron sputtering
%K properties<br>无机非金属材料
%K 类金刚石碳膜
%K 非平衡磁控溅射
%K 性能
%K 非平衡
%K 磁控溅射
%K 类金刚石碳膜
%K 性能
%K magnetron
%K sputtering
%K carbon
%K films
%K 稳定
%K 循环次数
%K 初始阶段
%K 摩擦系数
%K 含量增加
%K 沉积速率
%K 影响
%K 工作电流
%K 结果
%K 摩擦特性
%K 结构
%K 研究
%K 分析
%K 薄膜
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=C101C4C04993B4D94FCD8446E6CBEB3B&aid=5F688C2CAB38FADA&yid=D0E58B75BFD8E51C&vid=13553B2D12F347E8&iid=0B39A22176CE99FB&sid=73579BC9CFB2D787&eid=A58CF3BAE79427D0&journal_id=1005-3093&journal_name=材料研究学报&referenced_num=4&reference_num=20