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材料研究学报 1996
INVESTIGATION ON MICROSTRUCTURE OF THE INTERFACE BETWEEN IBAD THIN FILMS AND SUBSTRATE
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Abstract:
Molybdenum film and Fe16N2 thin film were deposited on Al2O3 (0001) and GaAs (001)substrate respectively by ion-beam assisted deposition (IBAD). The microstructure of the interface between the films and substrates were studied on atomic scale by using the
