%0 Journal Article
%T INVESTIGATION ON MICROSTRUCTURE OF THE INTERFACE BETWEEN IBAD THIN FILMS AND SUBSTRATE<br>IBAD薄膜与基体界面的显微结构
%A TAO Kun
%A HE Xiangjun
%A JIANG Hai
%A FAN Yudian
%A LI Hengde
%A <br>陶琨
%A 何向军
%A 江海
%A 范玉殿
%A 李恒德
%J 材料研究学报
%D 1996
%I 
%X Molybdenum film and Fe16N2 thin film were deposited on Al2O3 (0001) and GaAs (001)substrate respectively by ion-beam assisted deposition (IBAD). The microstructure of the interface between the films and substrates were studied on atomic scale by using the
%K ion-beam assisted deposition (IBAD)
%K interface
%K microstructure<br>离子束辅助沉积
%K 界面
%K 显微结构
%K 薄膜
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=C101C4C04993B4D94FCD8446E6CBEB3B&aid=452EAC7AC2490EAA&yid=8A15F8B0AA0E5323&vid=F3090AE9B60B7ED1&iid=0B39A22176CE99FB&sid=3E0812ED84A7B31D&eid=6235172E4DDBA109&journal_id=1005-3093&journal_name=材料研究学报&referenced_num=3&reference_num=2