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光子学报  2001 

DESIGN AND MODEL ANALYSIS OF TUNABLE OPTICAL FILTER ARRAY BASED ON MICROSTRUCTURE TECHNIQUE
微机构可调谐阵列滤光片的设计与模型分析

Keywords: MEMS,Micr ocavity,Optical filter array
微空腔
,微机构可调谐阵列滤光片,膜系设计,光谱响应模拟,电动力学模型

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Abstract:

A brand new technique is brought forward micr o tunable optical filter The optical thin film design and transmittive spectrum of the filter are given.T array on glass using optical thin fi lm technology. to construct hrough electrodynamics analysis,th e shape and dimens .ion of the device is decided

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