%0 Journal Article
%T DESIGN AND MODEL ANALYSIS OF TUNABLE OPTICAL FILTER ARRAY BASED ON MICROSTRUCTURE TECHNIQUE
微机构可调谐阵列滤光片的设计与模型分析
%A Chen Min
%A Liu Xu
%A Li Haifeng The State Key Lab of Modern Optical Instrumentation
%A Zhejiang Univ
%A Ha ngzhou
%A
刘旭
%A 刘旭
%J 光子学报
%D 2001
%I
%X A brand new technique is brought forward micr o tunable optical filter The optical thin film design and transmittive spectrum of the filter are given.T array on glass using optical thin fi lm technology. to construct hrough electrodynamics analysis,th e shape and dimens .ion of the device is decided
%K MEMS
%K Micr ocavity
%K Optical filter array
微空腔
%K 微机构可调谐阵列滤光片
%K 膜系设计
%K 光谱响应模拟
%K 电动力学模型
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=C67D3F0E6DEE86CAC06DF0A0774F3ED0&yid=14E7EF987E4155E6&vid=340AC2BF8E7AB4FD&iid=9CF7A0430CBB2DFD&sid=19E8BB8BE90732B2&eid=A3A7F1D1E8071003&journal_id=1004-4213&journal_name=光子学报&referenced_num=2&reference_num=4