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OALib Journal期刊
ISSN: 2333-9721
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THE PROGRESS OF SiC SINGLE CRYSTAL GROWTH AND ITS DEVICES
SiC单晶的生长及其器件研制进展

Keywords: SiC single crystal growth,epilayer growth,SiC devices
单晶生长
,外延生长,半导体,碳化硅器件

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Abstract:

SiC is a material with large band gap, high thermal conductivity, high electron saturation velocity, high breakdown voltage and low dielectric constant. Its promising properties make it a attractive material for high-frequency, high-power, high-temperature and radiation stable electronicdevices, UV dectector and short wave LED's. This review shows the progress of SiC bulk and filmgrowth and its devices.

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