MACHANISM OF SIZE EFFECT OF ELECTRIC CONDUCTIVITY IN ULTRATHIN METAL FILM
超薄金属膜电阻率尺寸效应

The experimental results showed that the ultrathin Al films possessed decreasing grain size and increasing electric resistivity with decreasing film thickness (size effect). Based on F-S Model, M-S Model and Matthiessen rule, the effect of surface scattering and grain boundary scattering on size effect of electric resistivity was analyzed quantitavely.