%0 Journal Article
%T MACHANISM OF SIZE EFFECT OF ELECTRIC CONDUCTIVITY IN ULTRATHIN METAL FILM<br>超薄金属膜电阻率尺寸效应
%A TANG zhaolin
%A HUANG Rongfang
%A WEN Lishi
%A <br>唐兆磷
%A 黄荣芳
%A 闻立时
%J 材料研究学报
%D 1997
%I 
%X The experimental results showed that the ultrathin Al films possessed decreasing grain size and increasing electric resistivity with decreasing film thickness (size effect). Based on F-S Model, M-S Model and Matthiessen rule, the effect of surface scattering and grain boundary scattering on size effect of electric resistivity was analyzed quantitavely.
%K ultrathin film electric resistivity size effect<br>超薄膜
%K 电阻率
%K 尺寸效应
%K 金属膜
%K 铝膜
%K 薄膜
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=C101C4C04993B4D94FCD8446E6CBEB3B&aid=325A59E7AEC88F02&yid=5370399DC954B911&vid=708DD6B15D2464E8&iid=E158A972A605785F&sid=BEE722AB5028E81F&eid=78976D931AD1540F&journal_id=1005-3093&journal_name=材料研究学报&referenced_num=6&reference_num=2