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OALib Journal期刊
ISSN: 2333-9721
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DEPOSITION AND PROPERTIES OF AMORPHOUS CARBON NITRIDE FILMS
非晶CN薄膜的制备及性质

Keywords: carbon nitride films,magnetic filtered plasma stream,IR absorption spectra,XPS
碳氮薄膜,磁过滤溅射离子,非晶,薄膜,性质

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Abstract:

Amorphous carbon nitride films have been formed by magnetic field filtered carbon ion deposition. The optical and electrical characteristics of samples deposited in different N2 partial pressure have been studied using FTlR, XPS, optical absorption spectr

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