%0 Journal Article
%T DEPOSITION AND PROPERTIES OF AMORPHOUS CARBON NITRIDE FILMS<br>非晶CN薄膜的制备及性质
%A WEI Aixiang
%A CHEN Dihu
%A ZHOU Youguo
%A LIN Liping
%A PENG Shaoqi
%A <br>魏爱香
%A 陈弟虎
%A 周友国
%A 林励萍
%A 彭少麒
%J 材料研究学报
%D 1998
%I 
%X Amorphous carbon nitride films have been formed by magnetic field filtered carbon ion deposition. The optical and electrical characteristics of samples deposited in different N2 partial pressure have been studied using FTlR, XPS, optical absorption spectr
%K carbon nitride films
%K magnetic filtered plasma stream
%K IR absorption spectra
%K XPS<br>碳氮薄膜
%K 磁过滤溅射离子
%K 非晶
%K 薄膜
%K 性质
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=C101C4C04993B4D94FCD8446E6CBEB3B&aid=01E7C9499564D50B&yid=8CAA3A429E3EA654&vid=59906B3B2830C2C5&iid=94C357A881DFC066&sid=C81D738643975BB0&eid=E3D3D8D1B650AE1E&journal_id=1005-3093&journal_name=材料研究学报&referenced_num=0&reference_num=9