THE COMPOSITION AND MICROSTRUCTURE OF THE Ti(C,N) FILMS PRODUCED BY LASER CHEMICAL VAPOUR GROWTH
激光化学气相反应生长Ti（C,N）薄膜的成分及微观结构

The composition and microstructure of Ti(C,N) films, which were produced by laser chemical deposition on Ti-6Al-4V substrate, were studied by the combined techniques of XRD, EPMA,TEM. The large area, uniform films which were mainly Ti(C,N) with small amounts of Ti2N phase, can be produced. The Al, V concentrations in films were lower than that of the substrates. TEM images implied that the films were equiaxial nano-crystalline without preferred orientation.