SURFACE DAMAGE OF LiNbO_3 IMPLANTED BY Ti ION
Ti 离子注入 LiNbO_3表面损伤分析

Damage and annealing effect of x,y and z cut LiNbO_3 implanted by 350keVhigh energy Ti(1.5×10~(17)/cm~2)were studied.The damage caused by ion implantation is re-moved by high temperatures annealing in dry oxygen atomsphere at different temperatures andtim