%0 Journal Article
%T SURFACE DAMAGE OF LiNbO_3 IMPLANTED BY Ti ION<br>Ti 离子注入 LiNbO_3表面损伤分析
%A ZHOU Jianhua
%A YOU Boqiang
%A ZHANG Liangying
%A YAO Xi
%A <br>周建华
%A 游伯强
%A 张良莹
%A 姚熹
%J 材料研究学报
%D 1992
%I 
%X Damage and annealing effect of x,y and z cut LiNbO_3 implanted by 350keVhigh energy Ti(1.5×10~(17)/cm~2)were studied.The damage caused by ion implantation is re-moved by high temperatures annealing in dry oxygen atomsphere at different temperatures andtim
%K ion implantation
%K surface damage
%K lattice sites<br>离子注入
%K 表面损伤
%K 晶格间隙
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=C101C4C04993B4D94FCD8446E6CBEB3B&aid=D167044D90C460D6&yid=F53A2717BDB04D52&vid=B31275AF3241DB2D&iid=B31275AF3241DB2D&sid=C4BBAD7A2DCC89BC&eid=AE43DE0664B02889&journal_id=1005-3093&journal_name=材料研究学报&referenced_num=0&reference_num=1