EFFECTS OF ELECTRODE NEGATIVE BIAS ON THE PROPERTIES OF DLC FILM
极板负偏压对类金刚石薄膜性质的影响

Diamond-like carbon (DLC) films on the germanium disks have been prepared from C2H2 and Ar futures by RF-DC Plasma chemical vaPOur dePOsition. It was observed that the film properties vary with variations of different deposition parameters, among which t