%0 Journal Article
%T EFFECTS OF ELECTRODE NEGATIVE BIAS ON THE PROPERTIES OF DLC FILM<br>极板负偏压对类金刚石薄膜性质的影响
%A GUO Lijun
%A XU Niankan
%A LIU Zhengtang
%A ZHANG Guifong
%A ZHENG Xiulin
%A <br>郭力军
%A 许念坎
%A 刘正堂
%A 张贵锋
%A 郑修麟
%J 材料研究学报
%D 1994
%I 
%X Diamond-like carbon (DLC) films on the germanium disks have been prepared from C2H2 and Ar futures by RF-DC Plasma chemical vaPOur dePOsition. It was observed that the film properties vary with variations of different deposition parameters, among which t
%K electrode negative bias
%K DLC film (diamond-like carbon film)<br>极板负偏压
%K 类金刚石薄膜
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=C101C4C04993B4D94FCD8446E6CBEB3B&aid=4A72C268B5FAA27B&yid=3EBE383EEA0A6494&vid=5D311CA918CA9A03&iid=CA4FD0336C81A37A&sid=5D71B28100102720&eid=09ABD5535D9B6D45&journal_id=1005-3093&journal_name=材料研究学报&referenced_num=5&reference_num=4