THE ION BEAM INDUCED PHASE TRANSFORMATION IN UNLIMITED SUPPLY SYSTEMS OF METAL AND SILICON
几种无限供应的金属/硅体系离子束混合相变

Five metal-silicon systems (Ni/Si,Cu/Si,Ti/Si,Nb/Si,Mo/Si) were chosen for this experiment and the results in a verity of condi-tions were summarized.The phase transformation by ion beam induced isnon-equilibrium process.This process might change the composition into ahigh free energy state and the compounds which are different from thatformed by thermal annealing.The induced action of ions decreases activeenergy and reactive temperature.It is also confirmed that the flux of atomicmigration plays an important role in ion beam induced thin film reation.