%0 Journal Article
%T THE ION BEAM INDUCED PHASE TRANSFORMATION IN UNLIMITED SUPPLY SYSTEMS OF METAL AND SILICON<br>几种无限供应的金属/硅体系离子束混合相变
%A MAO Sining YANG Xihong CHEN Jian LIU Jiarui GAO Wenyu YANG Feng
%A <br>毛思宁
%A 杨熙宏
%A 陈坚
%A 刘家瑞
%A 高文玉
%A 杨锋
%J 材料研究学报
%D 1989
%I 
%X Five metal-silicon systems (Ni/Si,Cu/Si,Ti/Si,Nb/Si,Mo/Si) were chosen for this experiment and the results in a verity of condi-tions were summarized.The phase transformation by ion beam induced isnon-equilibrium process.This process might change the composition into ahigh free energy state and the compounds which are different from thatformed by thermal annealing.The induced action of ions decreases activeenergy and reactive temperature.It is also confirmed that the flux of atomicmigration plays an important role in ion beam induced thin film reation.
%K ion beam mixing
%K metal/silicon system
%K phase transformation
%K thin film transformation<br>离子束混合
%K 金属/硅体系
%K 相变
%K 薄膜相变
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=C101C4C04993B4D94FCD8446E6CBEB3B&aid=4162589142036B96&yid=1833A6AA51F779C1&vid=38B194292C032A66&iid=0B39A22176CE99FB&sid=1B97AE5098AEB49C&eid=F260CE035846B3B8&journal_id=1005-3093&journal_name=材料研究学报&referenced_num=0&reference_num=1