MEMS/CMOS Compatible Gas Sensors Based on Spectroscopy Analysis
光谱式MEMS/CMOS兼容气敏传感器

A novel MEMS/CMOS compatible gas sensor based on spectroscopy analysis,which is fabricated on a (110) silicon wafer,is proposed.Its main principle,structure,and fabrications are introduced in detail.The gas sensor gains high sensitivity and selectivity but has low power consumption,and it should detect the grads of gas concentration for the mentioned advantages.