%0 Journal Article
%T MEMS/CMOS Compatible Gas Sensors Based on Spectroscopy Analysis<br>光谱式MEMS/CMOS兼容气敏传感器
%A Gao Chaoqun
%A Jiao Binbin
%A Liu Maozhe
%A Li Quanbao
%A Yang Kai
%A Shi Shali
%A Li Zhigang
%A Ou Yi
%A Jing Yupeng
%A Chen Dapeng
%A <br>高超群
%A 焦斌斌
%A 刘茂哲
%A 李全宝
%A 杨 锴
%A 石莎莉
%A 李志刚
%A 欧毅
%A 景玉鹏
%A 陈大鹏
%J 半导体学报
%D 2008
%I 
%X A novel MEMS/CMOS compatible gas sensor based on spectroscopy analysis,which is fabricated on a (110) silicon wafer,is proposed.Its main principle,structure,and fabrications are introduced in detail.The gas sensor gains high sensitivity and selectivity but has low power consumption,and it should detect the grads of gas concentration for the mentioned advantages.
%K MEMS
%K gas sensor
%K spectroscopy analysis<br>MEMS
%K 气敏传感器
%K 光谱分析
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=324A9379DC48A6380704291B722E9DA1&yid=67289AFF6305E306&vid=771469D9D58C34FF&iid=F3090AE9B60B7ED1&sid=CD65D483B6C24C75&eid=53A9347E622951C1&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=16