A Nodal Analysis Method for Electrically Actuated Bow-tie Shaped Fixed-Fixed Beams
静电驱动蝴蝶结状双端固支梁的节点分析法

In order to perform mixed-domain simulation of electrically actuated bow-tie shaped fixed-fixed beams,the governing equations treatment for trapeziform beam elements under electrostatic load was carried out based on a Galerkin residual method.The nodal model for the trapeziform beam and corresponding equivalent circuit is developed by HSpice.It proves accurate in comparison with FEA results and experiment results given by the Reference.