%0 Journal Article
%T A Nodal Analysis Method for Electrically Actuated Bow-tie Shaped Fixed-Fixed Beams<br>静电驱动蝴蝶结状双端固支梁的节点分析法
%A 李敏
%A 黄庆安
%A 李伟华
%J 半导体学报
%D 2008
%I 
%X In order to perform mixed-domain simulation of electrically actuated bow-tie shaped fixed-fixed beams,the governing equations treatment for trapeziform beam elements under electrostatic load was carried out based on a Galerkin residual method.The nodal model for the trapeziform beam and corresponding equivalent circuit is developed by HSpice.It proves accurate in comparison with FEA results and experiment results given by the Reference.
%K bow-tie shaped fixed-fixed beam
%K nodal analysis method
%K Galerkin residual method
%K equivalent circuit
%K MEMS<br>蝴蝶结状双端固支梁
%K 节点法
%K 伽辽金残余法
%K 等效电路
%K MEMS
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=5D6B8691507FA972A34B6E5403A164BD&yid=67289AFF6305E306&vid=771469D9D58C34FF&iid=59906B3B2830C2C5&sid=3C934644D84F2E3C&eid=9988E57A3960B075&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=22