Calculation,Simulation,and Testing for the Natural Frequency of a Micro Accelerometer
微加速计固有频率的推导及验证

A calculation and test method for the natural frequency of a high-g micro accelerometer with complex structures is presented.A universal formula for natural frequency,which can significantly simplify the structural design process,is deduced and confirmed by experiment.A simplified analytical model is established to describe the accelerometer's mechanical behavior and deduce the formula for the natural frequency.Finite element modeling is also conducted to evaluate the natural frequency of the micro-accelero...