%0 Journal Article
%T Calculation,Simulation,and Testing for the Natural Frequency of a Micro Accelerometer<br>微加速计固有频率的推导及验证
%A Xiong Jijun
%A Fan Bo
%A Guo Hugang
%A Gao Jianfei
%A <br>熊继军
%A 范波
%A 郭虎岗
%A 高建飞
%J 半导体学报
%D 2008
%I 
%X A calculation and test method for the natural frequency of a high-g micro accelerometer with complex structures is presented.A universal formula for natural frequency,which can significantly simplify the structural design process,is deduced and confirmed by experiment.A simplified analytical model is established to describe the accelerometer's mechanical behavior and deduce the formula for the natural frequency.Finite element modeling is also conducted to evaluate the natural frequency of the micro-accelero...
%K natural frequency
%K micro accelerometer
%K Rayleigh-Ritz formula<br>固有频率
%K 微加速度计
%K Rayleigh-Ritz公式
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=A9DD3801391D1D28AECCCAD62666C5CF&yid=67289AFF6305E306&vid=771469D9D58C34FF&iid=9CF7A0430CBB2DFD&sid=6FA25BADCDFACCA5&eid=72C9FC6259F90AE2&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=12