P-type ZnO thin films prepared by in situ oxidation of DC sputtered Zn3N2:Ga

The feasibility of a new fabrication route for N and Ga codoped p-type ZnO thin films on glass substrates, consisting of DC sputtering deposition of Zn_3N_2:Ga precursors followed by in situ oxidation in high purity oxygen, has been studied.The effects of oxidation temperature on the structural,optical and electrical properties of the samples were investigated by X-ray diffraction(XRD),scanning electron microscopy(SEM),optical transmittance and Hall effect measurements.The results were compared to a control...