%0 Journal Article
%T P-type ZnO thin films prepared by in situ oxidation of DC sputtered Zn3N2:Ga<br>
%A Zhang Jun
%A Xue Shuwen
%A Shao Lexi
%A <br>
%J 半导体学报
%D 2010
%I 
%X The feasibility of a new fabrication route for N and Ga codoped p-type ZnO thin films on glass substrates, consisting of DC sputtering deposition of Zn_3N_2:Ga precursors followed by in situ oxidation in high purity oxygen, has been studied.The effects of oxidation temperature on the structural,optical and electrical properties of the samples were investigated by X-ray diffraction(XRD),scanning electron microscopy(SEM),optical transmittance and Hall effect measurements.The results were compared to a control...
%K p-type
%K ZnO films
%K Zn3N2 films
%K codoping
%K magnetron sputtering<br>
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=E69F04BB136DD5CFE76FE5AD81630B10&yid=140ECF96957D60B2&vid=4AD960B5AD2D111A&iid=E158A972A605785F&sid=C56EB98C670F3E37&eid=E158A972A605785F&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=0