Effects of manufacturing errors on the characteristics of a polymer vertical coupling microring resonator
工艺公差对聚合物竖直耦合型微环谐振器性能的影响

The effects of manufacturing errors on transmission characteristics are analyzed for a polymer vertical coupling microring resonator. Calculated results show that the errors cause a shift and shape change of the transmission spectrum compared to the designed case without errors. Furthermore, accumulation and compensation for the errors is researched. In order to realize the normal filtering for the fabricated microring resonator device, some allowed errors are discussed.