%0 Journal Article
%T Effects of manufacturing errors on the characteristics of a polymer vertical coupling microring resonator<br>工艺公差对聚合物竖直耦合型微环谐振器性能的影响
%A Wang Yuhai
%A Qin Zhengkun
%A Wang Chunxu
%A Wang Lizhong
%A <br>汪玉海
%A 秦政坤
%A 王春旭
%A 王立忠
%J 半导体学报
%D 2012
%I 
%X The effects of manufacturing errors on transmission characteristics are analyzed for a polymer vertical coupling microring resonator. Calculated results show that the errors cause a shift and shape change of the transmission spectrum compared to the designed case without errors. Furthermore, accumulation and compensation for the errors is researched. In order to realize the normal filtering for the fabricated microring resonator device, some allowed errors are discussed.
%K microring resonator
%K manufacturing error
%K polymer
%K transmission spectrum<br>微环谐振器
%K 工艺公差
%K 聚合物
%K 传输光谱
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=12FAD7BF88E1F42A19E3141E3B0415D2&yid=99E9153A83D4CB11&vid=27746BCEEE58E9DC&iid=F3090AE9B60B7ED1&sid=5A62EBBABA86C363&eid=E158A972A605785F&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=14