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半导体学报 2010
Ag/PEPC/NiPc/ZnO/Ag thin film capacitive and resistive humidity sensorsKeywords: organic semiconductor,poly-N-epoxypropylcarbazole,nickel phthalocyanine,nano-powder,ZnO,sensor Abstract: A thin film of blended poly-N-epoxypropylcarbazole(PEPC)(25 wt.%),nickel phthalocyanine(NiPc)(50 wt.%) and ZnO nano-powder(25 wt.%) in benzene(5 wt.%) was spin-coated on a glass substrate with silver electrodes to produce a surface-type Ag/PEPC/NiPc/ZnO/Ag capacitive and resistive sensor.Sensors with two different PEPC/NiPc/ZnO film thicknesses(330 and 400 nm) were fabricated and compared.The effects of humidity on capacitance and resistance of the Ag/PEPC/NiPc/ZnO/Ag sensors were investigated at two freque...
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