%0 Journal Article %T Ag/PEPC/NiPc/ZnO/Ag thin film capacitive and resistive humidity sensors %A Kh S Karimov %A Kuan Yew Cheong %A M Saleem %A Imran Murtaz %A M Farooq %A Ahmad Fauzi Mohd Noor %A
Kh. S. Karimov %A Kuan Yew Cheong %A M. Saleem %A Imran Murtaz %A M. Farooq %A Ahmad Fauzi Mohd Noor %J 半导体学报 %D 2010 %I %X A thin film of blended poly-N-epoxypropylcarbazole(PEPC)(25 wt.%),nickel phthalocyanine(NiPc)(50 wt.%) and ZnO nano-powder(25 wt.%) in benzene(5 wt.%) was spin-coated on a glass substrate with silver electrodes to produce a surface-type Ag/PEPC/NiPc/ZnO/Ag capacitive and resistive sensor.Sensors with two different PEPC/NiPc/ZnO film thicknesses(330 and 400 nm) were fabricated and compared.The effects of humidity on capacitance and resistance of the Ag/PEPC/NiPc/ZnO/Ag sensors were investigated at two freque... %K organic semiconductor %K poly-N-epoxypropylcarbazole %K nickel phthalocyanine %K nano-powder %K ZnO %K sensor
Organic %K semiconductor %K poly-N-epoxipropylcarbazole %K nickel %K phthalocyanine %K nano-powder %K ZnO %K sensor %K capacitor %K resistance %U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=7A0684A851EA2F2D146EE2EDFD312242&yid=140ECF96957D60B2&vid=4AD960B5AD2D111A&iid=94C357A881DFC066&sid=0DD78FDC5CD0920F&eid=B31275AF3241DB2D&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=2