Laterally Electrostatically Driven Poly 3C-SiC Folded-Beam Resonant Microstructures
水平静电驱动式多晶3C-SiC折叠悬臂梁谐振器微结构

Micromachined comb-drive electrostatic resonators with folded-cantilever beams were designed and fabricated.A combination of Rayleigh's method and finite-element analysis was used to calculate the resonant frequency drift as we adjusted the device geometry and material parameters.Three micromachined lateral resonant resonators with different beam widths were fabricated.Their resonant frequencies were experimentally measured to be 64.5,147.2,and 255.5kHz,respectively,which are in good agreement with the simu...