%0 Journal Article
%T Laterally Electrostatically Driven Poly 3C-SiC Folded-Beam Resonant Microstructures<br>水平静电驱动式多晶3C-SiC折叠悬臂梁谐振器微结构
%A Wang Liang
%A Zhao Yongmei
%A Ning Jin
%A Sun Guosheng
%A Wang Lei
%A Liu Xingfang
%A Zhao Wanshun
%A Zeng Yiping
%A Li Jinmin
%A <br>王亮
%A 赵永梅
%A 宁瑾
%A 孙国胜
%A 王雷
%A 刘兴坊
%A 赵万顺
%A 曾一平
%A 李晋闽
%J 半导体学报
%D 2008
%I 
%X Micromachined comb-drive electrostatic resonators with folded-cantilever beams were designed and fabricated.A combination of Rayleigh's method and finite-element analysis was used to calculate the resonant frequency drift as we adjusted the device geometry and material parameters.Three micromachined lateral resonant resonators with different beam widths were fabricated.Their resonant frequencies were experimentally measured to be 64.5,147.2,and 255.5kHz,respectively,which are in good agreement with the simu...
%K lateral resonant device
%K folded-beam
%K comb structure
%K MEMS
%K resonator
%K silicon carbide<br>横向谐振器件
%K 折叠悬臂梁
%K 叉指结构
%K 微机械系统
%K 谐振器
%K 碳化硅
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=62B0AC318530711307CF24CAF8B656EC&yid=67289AFF6305E306&vid=771469D9D58C34FF&iid=5D311CA918CA9A03&sid=C13C5D291D09385A&eid=E5EC537789D37C32&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=9