Waveguide Simulation of a THz Si/SiGe Quantum Cascade Laser
太赫兹Si/SiGe量子级联激光器波导模拟

The waveguide design is one of the most important parts in a terahertz quantum cascade laser(QCL).Si/SiGe QCL waveguides,based on the Drude model and finite-difference time-domain (FDTD) method,are designed by the traditional refractive index waveguide structure,the single-sided metal structure,the double-metal clad structure,and a novel metal/metal silicide structure.The metal/metal silicide structure,showing high modal confinement,is convenient in process engineering and is expected to be a viable waveguide solution for Si/SiGe QCLs in the THz range.