%0 Journal Article
%T Waveguide Simulation of a THz Si/SiGe Quantum Cascade Laser<br>太赫兹Si/SiGe量子级联激光器波导模拟
%A Chen Rui
%A Lin Guijiang
%A Chen Songyan
%A Li Cheng
%A Lai Hongkai
%A Yu Jinzhong
%A <br>陈锐
%A 林桂江
%A 陈松岩
%A 李成
%A 赖虹凯
%A 余金中
%J 半导体学报
%D 2008
%I 
%X The waveguide design is one of the most important parts in a terahertz quantum cascade laser(QCL).Si/SiGe QCL waveguides,based on the Drude model and finite-difference time-domain (FDTD) method,are designed by the traditional refractive index waveguide structure,the single-sided metal structure,the double-metal clad structure,and a novel metal/metal silicide structure.The metal/metal silicide structure,showing high modal confinement,is convenient in process engineering and is expected to be a viable waveguide solution for Si/SiGe QCLs in the THz range.
%K terahertz
%K Si/SiGe
%K quantum cascade laser
%K waveguide<br>太赫兹
%K Si/SiGe
%K 量子级联激光器
%K 波导
%K terahertz
%K Si/SiGe
%K quantum
%K cascade
%K laser
%K waveguide
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=C20CA7B6BADDA048CA355DBF7E5164D6&yid=67289AFF6305E306&vid=771469D9D58C34FF&iid=94C357A881DFC066&sid=3DC9CEF02B8360EE&eid=547650636788ED84&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=12