System-Level Modeling and Simulation of Force-Balance MEMS Accelerometers
力平衡MEMS加速度计的系统级建模与仿真

This paper presents two approaches for system-level simulation of force-balance accelerometers.The derivation of the system-level model is elaborated and simulation results are obtained from the implementation of those strategies on the fabricated silicon force-balance MEMS accelerometer.The mathematical model presented is implemented in VHDL-AMS and SIMULINK TM,respectively.The simulation results from the two approaches are compared and show a slight difference.Using VHDL-AMS is flexible,reusable,and more accurate.But there is not a mature solver developed for the language and this approach takes more time,while the simulation model can be easily built and quickly evaluated using SIMULINK.