%0 Journal Article
%T System-Level Modeling and Simulation of Force-Balance MEMS Accelerometers<br>力平衡MEMS加速度计的系统级建模与仿真
%A Zhang Yufeng
%A Liu Xiaowei
%A Chen Weiping
%A <br>张宇峰
%A 刘晓为
%A 陈伟平
%J 半导体学报
%D 2008
%I 
%X This paper presents two approaches for system-level simulation of force-balance accelerometers.The derivation of the system-level model is elaborated and simulation results are obtained from the implementation of those strategies on the fabricated silicon force-balance MEMS accelerometer.The mathematical model presented is implemented in VHDL-AMS and SIMULINK TM,respectively.The simulation results from the two approaches are compared and show a slight difference.Using VHDL-AMS is flexible,reusable,and more accurate.But there is not a mature solver developed for the language and this approach takes more time,while the simulation model can be easily built and quickly evaluated using SIMULINK.
%K MEMS
%K force-balance accelerometers
%K system-level simulation
%K mathematical model<br>微机电系统
%K 力平衡加速度计
%K 系统级模型
%K 数学模型
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=4A9E97C55C40EB56E19C400FC432E44E&yid=67289AFF6305E306&vid=771469D9D58C34FF&iid=94C357A881DFC066&sid=3D9E2C3DB640307A&eid=55434AEC30CBAE6B&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=8