A novel MEMS inertial sensor with enhanced sensing capacitors
一个新型的大检测电容结构的MEMS惯性传感器研究

A novel MEMS inertial sensor with enhanced sensing capacitors is developed.The designed fabricated process of the sensor is a deep RIE process,which can increase the mass of the seismic to reduce the mechanical noise,and the designed capacitance sensing method is changing the capacitance area,which can reduce the air damping between the sensing capacitor plates and reduce the requirement for the DRIE process precision,and reduce the electronic noise by increasing the sensing voltage to improve the resolutio...