%0 Journal Article
%T A novel MEMS inertial sensor with enhanced sensing capacitors<br>一个新型的大检测电容结构的MEMS惯性传感器研究
%A Dong Linxi
%A Yan Haixi
%A Huo Weihong
%A Xu Li
%A Li Yongjie
%A Sun Lingling
%A <br>董林玺
%A 颜海霞
%A 霍卫红
%A 许立
%A 李永杰
%A 孙玲玲
%J 半导体学报
%D 2009
%I 
%X A novel MEMS inertial sensor with enhanced sensing capacitors is developed.The designed fabricated process of the sensor is a deep RIE process,which can increase the mass of the seismic to reduce the mechanical noise,and the designed capacitance sensing method is changing the capacitance area,which can reduce the air damping between the sensing capacitor plates and reduce the requirement for the DRIE process precision,and reduce the electronic noise by increasing the sensing voltage to improve the resolutio...
%K capacitive accelerometer
%K inertial sensor
%K high precision
%K DRIE<br>电容式传感器
%K 惯性传感器
%K 高精度分辨率
%K 深度粒子刻蚀
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=D947247BD6BCFE1A71D7C92A5DE266F6&yid=DE12191FBD62783C&vid=340AC2BF8E7AB4FD&iid=94C357A881DFC066&sid=3DE10300D7377C5A&eid=DF92D298D3FF1E6E&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=8